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Si nanocrystals deposited by HFCVD
JORGE ALBERTO LUNA LOPEZ
GODOFREDO GARCIA SALGADO
DIANA ELIZABETH VAZQUEZ VALERDI
ARTURO PONCE PEDRAZA
TOMAS FRANCISCO DIAZ BECERRIL
Acceso Abierto
Sin Derechos Reservados
SiOx
PL
Si-nc
The structural and optical properties of Si nanocrystal embedded in a matrix of offstoichiometric silicon oxide (SiOx, x<2) films prepared by hot filament chemical vapor deposition technique were studied. The films emit a wide photoluminescent spectrum from 400 nm to 800 nm and the maximum peak emission shows a blue-shift as the substrate temperature decreases. Also, a wavelength-shift of the absorption edge in transmittance spectra is observed, indicating an increase in the energy band gap. The Si nanocrystals size decreases from 6.5 to 2.5 nm as the substrate temperature is reduced from 1150 to 900 °C, as measured through High Resolution Transmission Electron Microscopy. A combination of mechanisms is proposed to explain the photoluminescence in the SiOx films, involving SiOx defects and quantum confinement effects.
2012
Memoria de congreso
Inglés
OTRAS
Versión revisada
submittedVersion - Versión revisada
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