Please use this identifier to cite or link to this item: http://cimav.repositorioinstitucional.mx/jspui/handle/1004/1844
Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films
JUAN RAMOS CANO
ABEL HURTADO MACIAS
WILBER ANTUNEZ FLORES
LUIS EDMUNDO FUENTES COBAS
PATRICIA AMEZAGA MADRID
MARIO MIKI YOSHIDA
Acceso Abierto
Sin Derechos Reservados
Ferroelectrics
Lead titanate
X-ray diffraction
Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 °C, in a Pb-rich atmosphere, for 4 and 6 h. The evolution of compositions and microstructure of the films was characterized before and after annealing, by grazing incidence X-ray diffraction, two-dimensional detection of grazing incidence diffraction with synchrotron radiation, scanning electronmicroscopy and high resolution transmission electron microscopy. X-ray diffraction results showed that the crystalline structure of optimized PbTiO3 films corresponded to a tetragonal perovskite-type, with lattice parameters a=0.387(4)nmand c=0.406(4)nm. In addition, the inverse pole figure of the fiber texture representation, had a Gaussian (1, 1, 0) component and distribution width Ω=15°.
2013
Artículo
Inglés
OTRAS
Versión revisada
submittedVersion - Versión revisada
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