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http://cimav.repositorioinstitucional.mx/jspui/handle/1004/2583| MICROSCOPY, SPECTROSCOPY AND PHOTOLUMINESCENCE OF OXIDE FILMS WITH SILICON NANOPARTICLES | |
| Jorge Alberto Luna López Alfredo Morales Sánchez MARIANO ACEVES MIJARES JESUS CARRILLO LOPEZ | |
| Acceso Abierto | |
| Atribución-NoComercial | |
| Silicon rich oxide (SRO) is a dielectric material that contains silicon nanoparticles (Si-nps). The composition, structure, and emission of the SRO films deposited by low pressure chemical vapor deposition (LPCVD) were studied; Different microscopic and spectroscopic techniques, such as Atomic Force Microscopy (AFM), High Resolution Transmission Electronic Microscopy and Energy Filtered-TEM (HRTEM and EFTEM), Rutherford Backscattering Spectroscopy (RBS), X-Ray Photoelectrons Spectroscopy (XPS) and Photoluminescence (PL) were used to characterize the SRO films. Results show that SRO films are formed by SiO2, Si-nps, and compounds. The composition, structure (morphology and Si-nps) and luminescence of the SRO films varied with the silicon excess. | |
| 2009-09 | |
| Memoria de congreso | |
| Inglés | |
| ESPECTROSCOPÍA MOLECULAR | |
| Versión aceptada | |
| acceptedVersion - Versión aceptada | |
| Aparece en las colecciones: | Artículos de Congresos |
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| MME 2009.pdf | 637.42 kB | Adobe PDF | Visualizar/Abrir |